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Some Characteristics of Different Laser Chambers

A coated ceramic insulator in a laser chamber that is exposed to a gaseous environment where impurities in the ceramic insulator are prevented from detrimentally contaminating the laser chamber by a high-purity insulating coating. The insulating coating prevents chemical interactions between the ceramic insulator and the gaseous environment. In particular, the coating prevents contamination, by impurities in the ceramic insulator, of the lasing gas.

A pulse discharge laser is provided having a pair of electrodes disposed within a laser chamber pressurized with a high- pressure gas. A preionizer generator intermittently produces preionization energy to preionize the high pressure gas in the laser chamber. A pulse forming network intermittently supplies a ramping voltage to the pair of electrodes. When the high pressure gas in the laser chamber is not properly preionized by the preionization energy a damaging arc may occur and lasing will not occur by discharge of the ramping voltage on the electrodes. A passive electrode arc protector is provided connected across the pair of laser electrodes to discharge the ramping voltage across the electrodes when the high pressure gas is not properly preionized to protect the laser electrodes from a damaging arc between them.

A laser chamber had angled reflectors that reflect acoustic and shock waves away from the laser discharge area to minimize acoustic and shock wave disturbances. The angled reflector may have different configurations to assist in the dissipation of the acoustic and shock waves. For example, the angled reflector may have a modulated reflective surface, such as having grooves or holes defined within the surface. Further, the angled reflector may have a reflective surface with acoustic and shock wave absorbing properties. The reflective surface with absorbent properties may be a felt metal or have multiple layered porous surfaces. In addition, the walls of the laser chamber may be modulated to assist in the dissipation of the acoustic waves and shock waves through absorption, scattering, and by generating interference within the reflected waves. Multiple layered porous surfaces may be used along the walls to absorb and scatter incident waves. The walls of the laser chamber may also be covered with an acoustic and shock wave absorbing material, such as felt metal. In other embodiments, the walls of the laser chamber are modulated with grooves , such as triangular or rectangular horizontal grooves, which scatter incident waves and generate interference within reflected waves.

The laser chamber includes a heat exchanger with a large surface area that defines an aerodynamic passage through which gas circulates in the laser chamber. The passage through which the gas circulates directs shock waves away from the discharge region so that the shock waves may dissipate elsewhere in the laser chamber. In addition, the large surface area of the heat exchanger efficiently cools the thermally energetic gas within the laser chamber. Ancillary chambers that are fluidically coupled to the main laser chamber are provided to permit shock waves to be directed away from the discharge area and to be dissipated within the ancillary chambers; Openings to the ancillary chambers are positioned such that shock waves generated by the electrode structure of the laser chamber may propagate directly into the ancillary chamber, where the shock waves then dissipate. Flow guides, such as blowers or flow vanes, may be provided in the ancillary chambers to generate a circulation of gas within the ancillary chambers that will support the laser chamber's flow of gas at the openings to the ancillary chambers. Thus, the circulating gas within the laser chamber remains uniform and stable.


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